Transistors

https://spectrum.ieee.org/cfet-intel-samsung-tsmc
https://resources.pcb.cadence.com/blog/2024-the-gaafet-fabrication-process
https://users.ece.utexas.edu/~athomsen/cmos_processing.pdf
https://en.wikipedia.org/wiki/CMOS

fab flow of stacked gaa Si nanosheet

CFET

https://www.linkedin.com/pulse/cfet-vertical-revolution-e-santosh-kumar-mfrac/

https://www.imec-int.com/en/articles/imec-puts-complementary-fet-cfet-logic-technology-roadmap

https://medium.com/@MattTraversoPhD/how-cfet-will-revolutionize-semiconductor-morphology-and-continue-moores-law-4705bc803d49

https://www.anandtech.com/show/18873/tsmc-we-have-working-cfets-in-the-lab-but-they-are-generations-away

https://www.eetimes.com/intel-samsung-tsmc-getting-serious-about-cfet/